Cryo-torr 8 cryopump manual

Available Configurations Industry-Standard Flanges Standard Manual Operation Optional Fully-Automated Operation with Marathon® Cryopump Controller Two (2) cryopumps operating with one (1) FL/H Compressor Displex® Technology Standard Scope of Supply CP-8 Cryopump FL, FL/H or Zephyr® Compressor 3 m (10 ft.) Flexible Gas Lines 3 m (10 ft.) Cold Head . On-Board® IS Cryopump System Operation Guide Brooks Automation Cryo-Torr ®, Fusion® The information included in this manual is Proprietary Information of Brooks Automation and is provided for th e use of Brooks Automation customers only and cannot be used for distribution, reproduction, or sale without the express written permission. contained in each compressor manual. The Cryo-Torr Pump provides fast, clean pumping of all gases in the to Torr range. The cryopump operates on the principle that gases can be Table Cryo-Torr 8 Cryopump Specifications Parameter Specifications Rough Pump Connection NW 25 ISO KF Integrated Hardware Second Stage Diode Pumping.

The manual provides instructions for installing, operating and servicing the Compressor. This compressor is avai lable in two versions: air-cooled, P/N G/G and water cooled, P/NG/G If you are installing or operating a Cryo-Torr or On-Board System you should also have available the appropriate cryopump or refrigerator. contained in each compressor manual. The Cryo-Torr Pump provides fast, cl ean pumping of all gases in the to Table Cryo-Torr 8 Cryopump Specifications. Cryo-Torr® Pump Installation, Operation and Maintenance Instructions © Helix Technology Corporation Pub. No. , Rev. , 2/09/04 ECO No. v.

14 de set. de MANUAL REQUIRED. CRYO-TORR. , 7, 8 AND 8F. CRYOPUMP. SYSTEM. COMPONENT. Installation, Operation and. Servicing Instructions. tiple cryopump installations, an On-Board Splitter Box or Cryo-Torr Interface can General Operating Specifications. User Manual. Brooks Automation. Important Notice: Other accessories, manuals, cables, calibration data, software, etc. are not included with this equipment unless listed in the above stock.